Chemical vapor deposition
Subject
Subject Source: Library of Congress Subject Headings
Found in 1 Collection or Record:
Papers of Harold M. Manasevit
Collection
Identifier: 2006-081-001
Abstract
These papers deal with Dr. Manasevit's work in Metalorganic Chemical Vapor Deposition (MOCVD) as applied to Silicon Heteroepitaxy and Gallium Arsenide. Other topics dealt with include Gas Phase Etching of Sapphire with Sulfur Fluorides Fluorides and PbTe and PbSnTe Films.
Dates:
1951-1981
Found in:
Science History Institute Archives